What materials are used to make thin film high-precision resistors?

Thin film high-precision resistors are mainly made of the following types of materials:

1、 Resistive thin film material
Resistance film is the core part of high-precision thin film resistors, and commonly used resistance film materials include:

Metal and alloy materials: such as nickel chromium alloy (Ni Cr), nickel copper alloy (Ni Cu), etc. These materials have good conductivity and stability, making them suitable for making high-precision resistors.
Metal oxide materials: such as ruthenium oxide (RuO ₂), manganese oxide (MnO ₂), etc. These materials have specific resistivity and temperature coefficient, which can be used to adjust the performance and stability of resistors.
Other special materials: such as carbon film, metal ceramic film, etc. These materials have unique advantages in certain specific applications, such as carbon film resistors having lower noise and better frequency characteristics.
2、 Base material
Base materials are used to support resistive films and electrodes, and commonly used base materials include:

Ceramic materials: such as aluminum oxide (Al ₂ O ∝) ceramics, aluminum nitride (AlN) ceramics, etc. These materials have good insulation properties and thermal stability, making them suitable for applications in high temperature and high humidity environments.
Glass materials: Some special glass materials can also be used to make substrates for thin film high-precision resistors. These materials typically have lower dielectric constants and losses, which are beneficial for maintaining the stability and accuracy of resistors.
3、 Electrode material
Electrode materials are used to connect with resistive films to form circuits. Common electrode materials include:

Precious metal materials such as silver (Ag), palladium (Pd), etc. These materials have good conductivity and chemical stability, making them suitable for making high-precision electrodes.
Alloy materials: such as nickel chromium alloy (Ni Cr), etc. These materials have unique advantages in certain specific applications, such as good welding performance and corrosion resistance.
4、 Protective layer material
Protective layer materials are used to protect resistive films and electrodes from external environmental influences. Common protective layer materials include:

Organic materials: such as epoxy resin, polyimide, etc. These materials have good insulation properties and adhesion, and can be used to make thinner protective layers.
Inorganic materials: such as glass glazes, silicates, etc. These materials have high hardness and corrosion resistance, and can be used to make thicker protective layers, improving the stability and reliability of resistors.
In summary, the materials used to make high-precision thin film resistors include resistive thin film materials, substrate materials, electrode materials, and protective layer materials. The selection and combination of these materials have a significant impact on the performance, stability, and reliability of resistors.